HERALD COST action (MP1401: Hooking together European research in Atomic Layer Deposition) and MASSENA doctoral program (Materials for Sensing and Energy harvesting) co-organize a Training School entitled “Chemistry of Atomic Layer Deposition”.
Experts from ALD-complementary fields animate a two days’ interactive training school about aspects associated with the chemistry behind the ALD process.
The following aspects will be addressed:
2- Precursor design and its impact on the ALD chemistry and kinetics
Dr. Jean-Marc Girard, CTO and Head of R&D at Air Liquide Advanced Materials, France
3- Modelling aspects and tools
Dr. Alain Estève, Research Director, Head of NEO group “Nano-Engineering and integration of metal-Oxide-based nanostructures and their interfaces” LAAS-CNRS, France
5- Approaches for area-selective ALD
Dr. Christophe Vallée, CEA – LETI - MINATEC, Grenoble, France. Head of the material department of Polytech Grenoble, Professor at Grenoble Alpes University and at Tsukuba University (Japan).
To enhance the interaction with the trainers, participants active in the field of ALD, or in activities in which ALD might play a role, are encouraged to prepare an A0 poster support.
Limited number of travel grants (650 €/participant) will be given upon evaluation of applications. Participation from ITC countries is strongly encouraged. Thank you to inform us of your application in the registration form.
Naoufal Bahlawane, Scientific Coordinator, Luxembourg institute of Science and Technology, Luxembourg
Sven Van Elshocht, Scientific Coordinator, imec, Belgium
Magalie Briquet, Support Officer, Luxembourg institute of Science and Technology, Luxembourg
Marylène Martin, Event Officer, Luxembourg institute of Science and Technology, Luxembourg
The training provides essential basis of the chemistry behind the ALD process for multidisciplinary researchers, PhD candidates, Master students and process or R&D engineers from public and private sectors.
13.30 - 14.00: Welcome coffee and registration
14.00 – 15.00: ALD opportunities and challenges Dr. Elisabeth Blanquet
15.00 – 15.40: Modelling aspects and tools (Part I) Dr. Alain Estève
15.40 - 16.00: Coffee break
16.00 – 16.40: Modelling aspects and tools (Part II) Dr. Alain Estève
17.00 – 18.00: Poster discussion
19:00 – 21:00: Dinner
8.30 - 9.00: Welcome coffee
9.00 – 10.00: In situ investigation of the ALD process Dr. Martin Knaut
10.00 – 10.45: Approaches for area-selective ALD (Part I) Christophe Vallée
10.45 - 11.15: Coffee break
11.15 – 12.00: Approaches for area-selective ALD (Part II) Christophe Vallée
12:00 – 13:00: Lunch
13:00 – 14:00: Precursor design and its impact on the ALD chemistry and kinetics, Dr. Jean-Marc Girard
14:00 – 16:00: Poster discussion
HERALD COST action
PRIDE doctoral school, MASSENA
Dates: 19-20 March 2018
Venue: Luxembourg Institute of Science and technology | 41 rue du Brill, L-4422 Belvaux
Registration fees: No participation fees but registration is mandatory.
Registration deadline: 12 March 2018
Accomodation: Some hotel rooms are available at Ibis hotel in Belval until 8 March 2018.
To book an hotel room, please use this booking form with the reference number 782631.