A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
Authors
T. Nguyen, N. Adjeroud, S. Glinsek, Y. Fleming, J. Guillot, P. Grysan, and J. Polesel-Maris
Reference
APL Materials, vol. 8, no. 7, art. no. 071101, 2020
