Atmospheric-pressure synthesis of atomically smooth, conformal, and ultrathin low-k polymer insulating layers by plasma-initiated chemical vapor deposition
Authors
D. Abessolo Ondo, F. Loyer, F. Werner, R. Leturcq, P. J. Dale, and N. D. Boscher
Reference
ACS Applied Polymer Materials, vol. 1, no. 12, pp. 3304-3312, 2019
