Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas

Authors

T. Nguyen, N. Adjeroud, M. Guennou, J. Guillot, Y. Fleming, A.-M. Papon, D. Arl, K. Menguelti, R. Joly, N. Gambacorti, and J. Polesel-Maris

Reference

Results in Materials, vol. 6, art. no. 100088, 2020

Link

doi:10.1016/j.rinma.2020.100088

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