Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas
T. Nguyen, N. Adjeroud, M. Guennou, J. Guillot, Y. Fleming, A.-M. Papon, D. Arl, K. Menguelti, R. Joly, N. Gambacorti, and J. Polesel-Maris
Results in Materials, vol. 6, art. no. 100088, 2020
doi:10.1016/j.rinma.2020.100088