Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr_0.52Ti_0.48O₃/Pt capacitors after post metallization annealing

Authors

I. Gueye, G. L. Rhun, O. Renault, D. Cooper, E. Defay, and N. Barrett

Reference

Applied Physics Letters, vol. 113, no. 13, art. no. 132901, 2018

Link

doi:10.1063/1.5041767