Large-scale deposition and growth mechanism of silver nanoparticles by plasma-enhanced atomic layer deposition
Authors
S. Wack, P. Lunca Popa, N. Adjeroud, J. Guillot, B. R. Pistillo, and R. Leturcq
Reference
The Journal of Physical Chemistry C, vol. 123, no. 44, pp. 27196-27206, 2019
