Toward thick piezoelectric HfO2-based films

29/11/2019

Authors

T. Schenk, N. Godard, A. Mahjoub, S. Girod, A. Matavz, V. Bobnar, E. Defay, and S. Glinsek

Reference

Physica Status Solidi (RRL) – Rapid Research Letters, doi:10.1002/pssr.201900626, 2019

Link

doi:10.1002/pssr.201900626

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