Atomic layer deposition of vanadium oxides: process and application review

Authors

V. P. Prasadam, N. Bahlawane, F. Mattelaer, G. Rampelberg, C. Detavernier, L. Fang, Y. Jiang, K. Martens, I. P. Parkin, and I. Papakonstantinou

Reference

Materials Today Chemistry, vol. 12, pp. 396-423, 2019

Link

doi:10.1016/j.mtchem.2019.03.004