Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas

02/04/2020

Authors

T. Nguyen, N. Adjeroud, M. Guennou, J. Guillot, Y. Fleming, A.-M. Papon, D. Arl, K. Menguelti, R. Joly, N. Gambacorti, and J. Polesel-Maris

Reference

Results in Materials, vol. 6, art. no. 100088, 2020

Link

doi:10.1016/j.rinma.2020.100088

Share this page: