Integrated SIMS-AFM instrument for accurate high-sensitivity and high-resolution chemical 3D analysis

Authors

Y. Fleming, T. Wirtz, and S. Eswara Moorthy

Reference

Microscopy and Microanalysis, vol. 21, no. S3, pp. 1437-1438, 2015

Link

doi:10.1017/S1431927615007965

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