Plasma-initiated chemical vapour deposition of organosiloxane thin films: From the growth mechanisms to ultrathin low-k polymer insulating layers

08/04/2020

Authors

D. Abessolo Ondo, R. Leturcq, and N. D. Boscher

Reference

Plasma Processes and Polymers, art. no. e2000032, 2020

Link

doi:10.1002/ppap.202000032

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