Single step fabrication of Silicon resistors on SOI substrate used as Thermistors
Authors
S. Rollo, D. Rani, W. Olthuis, and C. Pascual García
Reference
Scientific Reports, vol. 9, no. 1, p. 2835, 2019
Link
doi:10.1038/s41598-019-38753-x
Single step fabrication of Silicon resistors on SOI substrate used as Thermistors
S. Rollo, D. Rani, W. Olthuis, and C. Pascual García
Scientific Reports, vol. 9, no. 1, p. 2835, 2019
doi:10.1038/s41598-019-38753-x
