Study of a pulsed post-discharge plasma deposition process of APTES: synthesis of highly organic pp-APTES thin films with NH2 functionalized polysilsesquioxane evidences
S. Bulou, E. Lecoq, F. Loyer, G. Frache, T. Fouquet, M. Gueye, T. Belmonte, and P. Choquet
Plasma Processes and Polymers, vol. 16, no. 4, art. no. 1800177, 2019