Study of VO2 thin film synthesis by atomic layer deposition

Authors

V. P. Prasadam, B. Dey, S. Bulou, T. Schenk, and N. Bahlawane

Reference

Materials Today Chemistry, vol. 12, pp. 332-342, 2019

Link

doi:10.1016/j.mtchem.2019.03.005

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