Toward thick piezoelectric HfO2-based films
T. Schenk, N. Godard, A. Mahjoub, S. Girod, A. Matavz, V. Bobnar, E. Defay, and S. Glinsek
Physica Status Solidi (RRL) – Rapid Research Letters, vol. 14, no. 3, 2020
doi:10.1002/pssr.201900626
