Silicon Carbon Nitride Thin Films Produced by Magnetron Reactive Sputtering Physical Vapour Deposition: Structural, Chemical and Mechanical Characterisation
Auteurs :
P. Kouakou, P. Yoboue, B. Ouattara, V. Hody, P. Choquet, and M. Belmahi
Référence :
Journal of Surface Science and Technology, vol. 13, no. 1-2, pp. 44-52, 2017
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