The "Advanced Instrumentation for Ion Nano-Analytics" (AINA) group focuses on the development of scientific instruments based on charged particle beams and correlative workflows taking advantage of these instruments. The group’s R&D activity covers fundamental investigations, instrument development and application development. The targeted fields of application of the instrumentation and methodologies developed by AINA are:
- in-situ process control for nano-fabrication.
Our research activities are performed in cooperation with leading international instrument manufacturers and with research groups specialized in the relevant fields.
Main expertise fields
- Charged particle optics
- Ion-matter and laser-ion interactions
- Instrument development and prototyping (including mechanics, electronics, software development)
The development of innovative characterization tools is of paramount importance to advance the frontiers of materials science. Due to the ever-increasing complexity of devices and continuously shrinking geometries in materials science and engineering, the characterization tools and techniques are facing new challenges and need to anticipate future trends:
- The development of new hardware to improve following aspects of nano-analytics:
- Lateral resolution
- The development of correlative workflows to maximize information by combining results from different, complementary techniques
- The development of new algorithms and software to deal with the increasing complexity of data and to prepare for automation of data treatment
- The aforementioned developments need to be applicable to the fields of:
- materials science
- life sciences
- Experienced and multidisciplinary team
- Expertise covering the full spectrum required to turn innovative concepts and ideas into prototype instruments
- Long-term collaborations with world-leading instrument manufacturers
- Strong patent portfolio in the fields of focus
- 2 Zeiss ORION NanoFab HIM equipped with in-house developed SIMS, STIM, etc.
- 1 Thermo Fisher Scios DualBeam equipped with in-house developed SIMS
- 1 Thermo Fisher Tecnai F20 TEM equipped with in-house developed SIMS
- 2 Prototype MS for field-portable and space applications
- 1 SIMS for fundamental studies and component testing (CMS)
- 5 Test benches for charged particle optics instrumentation
Review papers and book chapters
- Wirtz, T.; De Castro, O.; Audinot, J.-N.; Philipp, P. Imaging and Analytics on the Helium Ion Microscope. Annu. Rev. Anal. Chem. 2019, 12 (1), 523-543
- Eswara, S.; Pshenova, A.; Yedra, L.; Hoang, Q. H.; Lovric, J.; Philipp, P.; Wirtz, T. Correlative Microscopy Combining Transmission Electron Microscopy and Secondary Ion Mass Spectrometry: A General Review on the State-of-the-Art, Recent Developments, and Prospects. Appl. Phys. Rev. 2019, 6 (2), 021312.
- Wirtz, T.; Dowsett, D.; Philipp, P. SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics. In Helium Ion Microscopy; Hlawacek, G., Gölzhäuser, A., Eds.; Springer International Publishing Switzerland, 2016.
- Wirtz, T.; Philipp, P.; Audinot, J.-N.; Dowsett, D.; Eswara, S. High-Resolution High-Sensitivity Elemental Imaging by Secondary Ion Mass Spectrometry: From Traditional 2D and 3D Imaging to Correlative Microscopy. Nanotechnology 2015, 26 (43), 434001.