Atmospheric-pressure synthesis of atomically smooth, conformal and ultrathin low-k polymer insulating layers by plasma-initiated chemical vapour deposition

25/10/2019

Auteurs

D. Abessolo Ondo, F. Loyer, F. Werner, R. Leturcq, P. J. Dale, and N. D. Boscher

Référence

ACS Applied Polymer Materials, 2019

Lien

doi:10.1021/acsapm.9b00759

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