Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas

Auteurs

T. Nguyen, N. Adjeroud, M. Guennou, J. Guillot, Y. Fleming, A.-M. Papon, D. Arl, K. Menguelti, R. Joly, N. Gambacorti, and J. Polesel-Maris

Référence

Results in Materials, vol. 6, art. no. 100088, 2020

Lien

doi:10.1016/j.rinma.2020.100088