Controlling electrical and optical properties of zinc oxide thin films grown by thermal atomic layer deposition with oxygen gas

02/04/2020

Auteurs

T. Nguyen, N. Adjeroud, M. Guennou, J. Guillot, Y. Fleming, A.-M. Papon, D. Arl, K. Menguelti, R. Joly, N. Gambacorti, and J. Polesel-Maris

Référence

Results in Materials, vol. 6, art. no. 100088, 2020

Lien

doi:10.1016/j.rinma.2020.100088

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