Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr_0.52Ti_0.48O₃/Pt capacitors after post metallization annealing

Auteurs

I. Gueye, G. L. Rhun, O. Renault, D. Cooper, E. Defay, and N. Barrett

Référence

Applied Physics Letters, vol. 113, no. 13, art. no. 132901, 2018

Lien

doi:10.1063/1.5041767