Integration of silver nanowires into SU-8 hollow cantilevers for piezoresistive-based sensing
Auteurs
H. Han, V. Martinez, C. Forró, J. Polesel-Maris, J. Vörös, and T. Zambelli
Référence
Sensors and Actuators A: Physical, vol. 301, no. 111748, 2020
Lien
doi:10.1016/j.sna.2019.111748