Printed barium strontium titanate capacitors on silicon

08/05/2015

Auteurs

D. Sette, V. Kovacova, and E. Defay

Référence

Thin Solid Films, vol. 589, pp. 111-114,  2015

Description

In this paper, we show that Barium Strontium Titanate (BST) films can be prepared by inkjet printing of sol–gel precursors on platinized silicon substrate. Moreover, a functional variable capacitor working in the GHz range has been made without any lithography or etching steps. Finally, this technology requires 40 times less precursors than the standard sol–gel spin-coating technique.

Lien

doi:10.1016/j.tsf.2015.04.087

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