Printed barium strontium titanate capacitors on silicon
D. Sette, V. Kovacova, and E. Defay
Thin Solid Films, vol. 589, pp. 111-114, 2015
In this paper, we show that Barium Strontium Titanate (BST) films can be prepared by inkjet printing of sol–gel precursors on platinized silicon substrate. Moreover, a functional variable capacitor working in the GHz range has been made without any lithography or etching steps. Finally, this technology requires 40 times less precursors than the standard sol–gel spin-coating technique.