Pulsed plasma initiated chemical vapor deposition (PiCVD) of polymer layers − A kinetic model for the description of gas phase to surface interactions in pulsed plasma discharges
Auteurs
F. Loyer, S. Bulou, P. Choquet, and N. D. Boscher
Référence
Plasma Processes and Polymers, art. no. 1800121, 2018
