Study of VO2 thin film synthesis by atomic layer deposition
Auteurs
V. P. Prasadam, B. Dey, S. Bulou, T. Schenk, and N. Bahlawane
Référence
Materials Today Chemistry, vol. 12, pp. 332-342, 2019
Lien
doi:10.1016/j.mtchem.2019.03.005
Study of VO2 thin film synthesis by atomic layer deposition
V. P. Prasadam, B. Dey, S. Bulou, T. Schenk, and N. Bahlawane
Materials Today Chemistry, vol. 12, pp. 332-342, 2019
doi:10.1016/j.mtchem.2019.03.005
