Study of a pulsed post-discharge plasma deposition process of APTES: synthesis of highly organic pp-APTES thin films with NH2 functionalized polysilsesquioxane evidences

Authors

S. Bulou, E. Lecoq, F. Loyer, G. Frache, T. Fouquet, M. Gueye, T. Belmonte, and P. Choquet

Reference

Plasma Processes and Polymers, vol. 16, no. 4, art. no. 1800177, 2019

Link

doi:10.1002/ppap.201800177

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